YANG Yun-ke, GAO Li-hua, CHEN Hai-xin, FU Song. CFD NUMERICAL SIMULATION AND OPTIMIZATION OF GAN-MOCVD REACTOR[J]. Engineering Mechanics, 2007, 24(9): 173-178.
Citation: YANG Yun-ke, GAO Li-hua, CHEN Hai-xin, FU Song. CFD NUMERICAL SIMULATION AND OPTIMIZATION OF GAN-MOCVD REACTOR[J]. Engineering Mechanics, 2007, 24(9): 173-178.
shu

CFD NUMERICAL SIMULATION AND OPTIMIZATION OF GAN-MOCVD REACTOR

  • (School of Aerospace Engineering, Tsinghua University, Beijing 100084, China)

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  • Received Date: December 31, 1899
  • Revised Date: December 31, 1899
    Abstract
  • The flow field in metal organic chemical vapor deposition (MOCVD) reactor is simulated three-dimensionally by computational fluid dynamics (CFD) theory. The governing equations are discretized with the finite volume method based on the non-stagger grids system and are solved by the SIMPLE scheme and the improved pressure-velocity method. How the different working parameters affect the flow patterns in the MOCVD reactor is studied in this paper. The geometric structure and inflow pattern of a MOCVD reactor which is under trial-production are improved in order to provide steady and uniform flow field and improve the quality of GaN films.
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    FU Song

    • (School of Aerospace Engineering, Tsinghua University, Beijing 100084, China)

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