Abstract: The critical formation condition of screw misfit dislocation which locates in a cylindrical nanopore surface with interface stress is investigated. The analytical solutions of complex potential functions in the film and the infinite matrix are derived by means of the complex variable method, with the aid of complex potential functions. The elastic energy of the misfit dislocation is given, which revels the influence of the surface/interface effects on the formation of misfit dislocation which grows on a cylindrical nanopore surface. The results show that surface/interface effects on the nanoscale have great effect on misfit dislocation formation, and the critical formation condition of screw misfit dislocation can have large differences with different surface/interface effects in the critical film thickness. When the composite substrate and film of the relative shear modulus exceeds a certain value, screw misfit dislocation can form only considering negative surface/interface effects. Misfit dislocation forms easier when considering the negative surface/interface effects in smaller film thickness. A larger film thickness is found more prone to form misfit dislocation under the surface/interface effects.