曹天捷, 丁芳. 一种两端固支微开关梁的静力学分析模型[J]. 工程力学, 2006, 23(9): 42-47,5.
引用本文: 曹天捷, 丁芳. 一种两端固支微开关梁的静力学分析模型[J]. 工程力学, 2006, 23(9): 42-47,5.
CAO Tian-jie, DING Fang. STATIC ANALYSIS MODEL OF MICRO-MACHINED SWITCH CONSISTING OF CLAMPED-CLAMPED BEAM[J]. Engineering Mechanics, 2006, 23(9): 42-47,5.
Citation: CAO Tian-jie, DING Fang. STATIC ANALYSIS MODEL OF MICRO-MACHINED SWITCH CONSISTING OF CLAMPED-CLAMPED BEAM[J]. Engineering Mechanics, 2006, 23(9): 42-47,5.

一种两端固支微开关梁的静力学分析模型

STATIC ANALYSIS MODEL OF MICRO-MACHINED SWITCH CONSISTING OF CLAMPED-CLAMPED BEAM

  • 摘要: 建立了一种两端固支微开关梁的静力变形分析模型,该模型将受电场力作用的两端固支微开关梁的受力变形分为三个阶段:梁受电场力作用、梁中点不受约束的变形阶段;梁受电场力作用、且梁中点变形受约束的变形阶段,即此时在梁的中点还要受到一支反力的作用;梁受电场力和一个附加支反力作用,并在梁的中间一段具有指定的位移和转角的变形阶段;在第二阶段中梁所受支反力的大小及第三阶段中梁所受支反力的大小和位置都与驱动电压有关。在实例中,设计了一种求解各未知量的迭代方法,并给出了部分计算结果,包括:梁中点挠度和驱动电压间的关系、梁中点挠度和梁中点弯矩间的关系、梁长对吸合电压影响、驱动电极长对吸合电压的影响等,从中可得出一些有益的结论。

     

    Abstract: A static analysis model for micro-machined switch consisting of a clamped-clamped beam is presented. In this model, the deflection of the clamped-clamped beam subject to the electrostatic force are divides into three stages:the first is a clamped-clamped beam subject to the electrostatic force without any constrain at the center;the second is a beam subject to the electrostatic force with a constraint at the center,i.e. the beam is subject to an extra reacting force at the center besides the electrostatic force;the third is a beam subject to both the electrostatic force and a reacting force with given deflection and angle of rotation over the central part of the beam. The reacting force at the second stage and the reacting force and its position at the third stage are related with the applied voltage. In the examples, a method to solve for the unknown boundary conditions and the applied voltage is presented and some results are given,including the relationship between the deflection at the center of the beam and the applied voltage,the effect of the length of the beam on the pull-in voltage,and the effect of the length of the electrode on the pull-in voltage,and so on,form which some beneficial conclusions can be obtained.

     

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