A HIGH PRECISION COMPUTATIONAL MODEL AND METHOD FOR ANALYZING THE LARGE DEFLECTION OF MICROBEAMS DRIVEN BY ELECTROSTATIC FORCE

Considering the influence of electrostatic force edge effects, first order controlling equations of a large deflection bending microbeam was deduced by degenerating differential equations of a large deflection bending thin plate. The shooting method was adopted to change the large deflection, a boundary value problem, of the microbeam into an initial value problem. By means of the method of a high precision iterative refinement extended homogeneous capacity integration, a new computational model and method were established to analyze the deformation of a large deflection bending microbeam. In order to guarantee the convergence and stability in solving nonlinear algebraic equations, an incremental iterative algorithm was put forward according to the load characteristic. Numerical calculated results show that the proposed method is more accurate and stable, which is an effective method to analyze the large deflection deformation of a microbeam.