ANALYSIS OF TEMPERATUIRE CHANGE EFFECT ON ELECTROSTATICALLY ACTUATED CLAMPED CIRCULAR MICRO-PLATES

Based on the differential governing equation of electrostatically actuated clamped circular micro-plates with temperature changes, Taylor's series expansion and limit analysis are first used to modify the differential governing equation for an axisymmetric solid circular plate. In the modified equation, the singularity at the center of a micro plate does not occur. The modified equation is then employed to analyze the electrostatically actuated clamped circular micro-plate with temperature changes. The analysis for a circular micro-plate is classified into three stages, named a normal mode, a transition mode, and a touch mode. The numerical solution of the differential governing equation for different modes is mainly attributed to solve for an applied voltage and one unknown boundary condition, which could be obtained by using a two-fold method of bisection based on the shooting method. In examples, the entire mechanical behavior of a circular plate over an operational voltage range is investigated and the effects of temperature changes on a pull-in voltage with different dimensions of the plate are studied. The obtained results are useful for understanding the effect of temperature changes on the behavior of a circular plate.