Abstract: In recent years, there have been a number of papers concerning edge effect stresses in bimaterial and multilayer thin films. Most authors focus attention on regular geometric configuration, using different analytic methods (e.g. trigonometric series, stress function, integral equation, asymptotic analysis, etc. ), or numerical methods (e.g. FEM, BEM, etc.). In the present paper, thin films with more complex edge geometric configuration are analyzed using finite element method. The comparision of stress distributions at the interface of different geometry provides a deeper understanding on some subjects, such as, how edge geometric configuration or composite configuration affects the stress fields, and how to optimize the structure of bilateral and multilayer thin films.