Abstract: By the selection of reference surface of coordinates and based on Von Ká r mán's theory, the compact control equations of nonlinear axisymmetric vibrations of heated double-layer thin plates are established using Hamilton's principle. The time-spatial variables are separated by Galerkin抯 technique, and the characteristic relation of frequency vs. amplitude for nonlinear vibrations of heated double-layer plates is obtained from Lindstedt-Poincaré perturbation method. Taking the driving membrane of a thermally actuated micropump as example, the effects of temperature on its vibration behavior are studied. The present method can be extended easily to the analysis of nonlinear vibrations of heated thin single or multi-layer plates.