Abstract: A modeling method, using the compliance matrix, is proposed in this study to analyze the compliant mechanism consisting of leaf flexures. The closed-form equations are formulated for the compliance elements in the compliance matrix, which are validated by the finite element analysis (FEA) and experiments. Both FEA and experimental results coincide well with theoretical results. By analyzing the closed-form equations, the effects of geometric parameters on the compliant performance of the mechanism are investigated. The compliance matrix provides an effective and accurate method for the design and theoretical analysis of the compliant mechanism, which is of great significance for the practical application of compliant mechanisms in micro-/nano-fabrication equipment.