双线性振动微陀螺特征频率光学测试和有限元分析

详细信息

OPTICAL TESTING AND FINITE ELEMENT ANALYSIS OF EIGENFRE- QUENCY IN THE DOUBLE LINEAR VIBRATORY MICRO-GYROSCOPE

(1. Department of Engineering Mechanics, Southeast University, Nanjing, Jiangsu 210096, China; 2. Mechanical Engineering College, Yangzhou University, Yangzhou, Jiangsu 225009, China)

摘要: 微机械陀螺仪特征频率的研究对其设计至关重要。该文运用高速图像采集技术、显微技术和数字图像相关方法，实测了一组微陀螺的固有频率。该测试方法非接触无损测量，测试结构简单，测量精度高。测试结果与有限元计算结果一致，验证了有限元分析方法用于微机械系统的可行性和有效性。对比结果表明，所建立的有限元模型合理，分析结果可靠。最后，利用有限元数值模拟技术研究了微陀螺结构尺寸对特征频率的影响，其分析结果对微陀螺仪的设计具有指导性意义。
- 微陀螺 /
- 时间序列图像 /
- 数字相关 /
- 有限元 /
- 模态分析
Abstract: tudy of eigenfrequency is key to the design of the micromechanical gyroscope. A series of micro-gyroscopes are tested by the use of high-speed camera, microscope and digital image correlation technique. The presented optical testing method is simple to set up, and has a high accuracy. The testing results agree well with those of the finite element method, showing that it is reliable and practical to use the finite element modal for micro electro-mechanical system analysis. Using the finite element method, the effects of structural size of micro-gyroscope on its natural frequency are investigated, which can help the design of micro-gyroscope.
- micro-gyroscope /
- temporal series images /
- digital correlation /
- finite element /
- modal analysis

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(1. Department of Engineering Mechanics, Southeast University, Nanjing, Jiangsu 210096, China; 2. Mechanical Engineering College, Yangzhou University, Yangzhou, Jiangsu 225009, China)